Presented by Dr. Stella Maris Van Eek, FHR Anlagenbau GmbH
Our task is to supply equipment and sputter-targets for broadly vacuum-coating. This experience enables us to integrate tool and materials in order to develop a robust process for the industrial manufacturing of thin films.
As an example we show here a Roll to Roll tool for coating of low emissivity (low-E) filters on flexible PET.
A combination of metal and oxide double and triple layers was developed to reflect non desired infrared thermal radiation while maintaining the transmittance in the visible range.
The in-situ metrology results will be discussed and compared with ex-situ measurements.
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