SiOx Barrier Films for Flexible Displays

Presented by T. Komori, TOPPAN PRINTING CO. LTD.

High barrier SiOx film was obtained by a roll-to-roll PECVD system using hexamethyldisiloxane (HMDSO) and oxygen. We found that SiOx film deposited by PECVD with HMDSO contains little carbon, and the refractive index and density were near 1.46 and 2.2g/cm3 respectively, comparable to those of thermal silicon oxide. The water vapor transmission rate (WVTR) of only 40nm thick SiOx on COP (100μm) reached the detection limit of MOCON and we confirmed the possibility of application of the SiOx film to OLED by an encapsulation test.