Optical and electrical properties of zinc oxide based TCO layers on polymer films

Presented by Matthias Fahland, John Fahlteich, Steffen Günther, Tobias Vogt
Fraunhofer Institute of Electron Beam and Plasma Technology

TCO (transparent conducting oxide) layers on polymer films have a high importance for emerging applications like flexible solar cells and large area lighting. The restriction for substrate temperatures to be below 150°C results into a different process compared to the well investigated coating on glass. The new results will be focused on zinc oxide based materials. The effect of the type of doping as well as the doping level will be investigated. The electrical and optical properties of the layers are presented, including an evaluation of application in the above mentioned areas.