Electron Beam Induced Bias for High Speed, High Quality Coating of Ultra Thin Capacitor Web

Presented by Dr. Stephan Küper, Leybold Optics GmbH

In the capacitor film industry there is a continuous strive for metalizers
producing with higher coating speed and better film quality. At the same time,
the film thickness is continuously decreasing. In order to metalize film with
higher coating speeds or with lower peak temperature, a key issue is to improve
the cooling of the film during the metallization process. This paper compares the
different cooling strategies, the physical forces at work and the effects on the
thermal stress to the film. Numerical calculations were performed with the target
of showing the differences of both systems and comparing their results semi
quantitatively.