Determination of the Vacuum System for R2R Coaters by Using a Simulation Program

Presented by Norbert Palenstijn, Leybold USA, Inc

The determination of the best suitable pumping systems often depends on experience. Simple calculation based on chamber volume, required pressure and gas flow can lead to insufficient pumping capacity. Oerlikon Leybold Vacuum has developed a simulation tool which combines calculation and experience. Outgassing rates of different materials, conductance losses of piping and valves, cut-in pressures of booster and high vacuum pumps and many more parameters are elements of the pumping simulation. The results are continuously compared and adjusted by real life measurements.