Comparison of Different Sputter Processes for ITO: Planar DC versus Planar AC

Presented by P. Sauer, Applied Films GmbH & Co.

The latest generation of Flexible Displays, PDAs, touch screens and mobil phones need Transparent Conductive Oxides as a reliable transparent electrode. TCO is most commonly made by sputtering ITO. Due to rising ITO material costs, the market requires low material consumption and higher target utilization. In this paper the latest developments of DC and MF planar magnetrons for ITO sputtering are reported and compared. Resulting data about target utilization, specific resistance and optical properties are discussed, supported by SEM pictures.