Varien Inc.

Basics of Maintenance and Troubleshooting of Vacuum Diffusion Pumps Members Public

Presented by Bill Foley, Varian Inc. While vacuum issues alone are not among the top contributors of unscheduled downtime, vacuum system performance is a critical factor in achieving process repeatability and optimizing overall tool operation. Proper maintenance of the vacuum pump, the key element of the vacuum system, is necessary

Kevin Lifsey
Conference Proceedings