University Ghent

Modelling of the Target Voltage Behaviour in Reactive Sputtering Members Public

Presented by R. De Gryse, University Ghent It has been shown that at least two mechanisms are responsible for target poisoning during reactive sputtering, i.e. sub plantation of the reactive gas ions underneath the target surface and chemisorption on the target surface. At first sight, both processes may look

Kevin Lifsey
Conference Proceedings