Lithography Process
Development of Roll-to-Roll (R2R) Continuous Manufacturing System for Digital Patterning Lithography Process Paid Members Public
Presented by Jaeyoung Kim, Korea Institute of Machinery and Materials (KIMM) This paper introduces the development of a maskless roll-to-roll (R2R) digital exposure process for continuous manufacturing systems. Applying digital exposure technology to the R2R system facilitates high-quality and large-scale production and proposes solutions to various emerging challenges. Notably, a