Modular large-scale multi-layer coater, to be optimized for the application

Presented by Dr. Michael Muecke, Bühler Leybold Optics

The R2R vacuum coaters platform FLC 1600 equipped with magnetron sputtering is designed for the large-scale production of complex multilayer stacks. Applications such as anti-reflective for the consumer industry or low emissivity stack for energy control in architectural applications require both the precise control of each layer and the high productivity offered by the platform. Above that, the range of applications extends to decorative coatings or different electronic applications such as solar and electro chromatic applications or flexible printed circuit boards. Each of these applications may need different setup to ensure competitive quality and production costs.

This presentation with will highlight how the platform can be optimally configured to fit the respective application. The productivity can be maximized by optimizing the number process compartments while the innovative maintenance concept ensures minimal down time. State of the art process control and automation is the key to high product quality and productivity. Each layer is deposited with high precision and a high deposition rate by a non-reactive or reactive process with an in-situ control of the stability and quality of the product.